Wholefiled Optical Metrology: Surface Displacement Measurement Wholefield Optical Metrology: Surface Displacement Measurement
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چکیده
منابع مشابه
Optical Metrology under Extreme Conditions
Optical metrology provides full field, noncontact, precise measurement of various physical parameters of materials, structures, and devices. These properties include kinematic parameters (displacement, velocity, and acceleration), deformation parameters (strains, curvature, and twist), surface parameters (shape and roughness), and mechanical properties of materials (Young’s modulus, Poisson’s r...
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Modern industry needs quick and reliable measurement methods for measuring deformation, position, shape, roughness, etc. This thesis is mainly concerned with industrial applications of speckle metrology. Speckle metrology is an optical non-contact whole field technique that provides the means to measure; deformation and displacement, object shape, surface roughness, vibration, and dynamic event...
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The use of phase contrast spectral optical coherence tomography to measure two orthogonal displacement components on a slice within a scattering medium is demonstrated. This is achieved by combining sequential oblique illumination of the object and recording two interferograms before plus two after the deformation. The proposed technique is illustrated with results from a sample undergoing simp...
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